摘要 在相位测量轮廓术中,测量系统中投影仪等存在的非线性响应大大影响了相位测量的精度,因此,如何快速高效地消除系统中的非线性误差是提高测量精度的关键。本文建立了相位误差的精确模型,并提出了一种基于相位误差精确模型的相位提取方法,利用高步数相移算法预先标定各频谱分量的比例关系,再通过迭代运算即可得到高精度的相位分布。实验结果表明,该方法可有效补偿非线性误差,从而大大提高相位测量精度,同时,由于各频谱分量是通过高步数相移预先标定的,仅三步相移即可得到高精度相位分布,满足了快速、实时的测量要求。 In the phase measuring profilometry,the phase measuring accuracy could be heavily affected by the nonlinearity effects of the projecting and imaging devices.Therefore,it is very important to reduce the nonlinear errors fast and efficiently.An analytic model of nonlinear errors is introduced.Then we propose a phase compensation method which is based on the accurate mathematical model of the phase error.The proportion of each harmonic component is collected by using a large-step phase-shifting algorithm to measure a reference plane.Then the phase errors of the measured object could be compensated by an iterative algorithm.The experimental results show that the proposed method can realize nonlinear error compensation effectively and improve the precision of phase measurement.Meanwhile,since all the harmonic components are pre-calibrated,there is no extra fringe needed,which can meet the requirements of fast and real-time measurement.
机构地区 四川大学电子信息学院
出处 《光电工程》 CAS CSCD 北大核心 2021年第4期44-51,共8页 Opto-Electronic Engineering
基金 国家自然科学基金资助项目(61675141) 四川省重大科学仪器设备专项(2019ZDZX0038)。
关键词 非线性相位误差 相位误差补偿 相位测量轮廓术 后处理 nonlinear phase error phase error compensation phase measuring profilometry(PMP) post-processing
