摘要 针对微纳器件三维形貌快速检测及重构中的高精度和高速度难以兼得的技术难题,本文提出一种基于时域相移技术的结构光检测方法,通过空间光调制器对测量光进行调制,结合时域相移技术实现微纳器件三维形貌检测和重构。相比传统的结构光检测方法,本技术在样片轴向扫描的同时,利用空间光调制器进行相移测量,保证测量精度的同时提高测量的效率。通过对测量数据进行分析,该方法可快速实现三维形貌检测和重构,测量精度可优于10 nm。 Aiming at the technical difficulties in the rapid detection and reconstruction of three-dimensional micro-nano devices that are difficult to achieve both high precision and high speed,this paper proposes a structured light detection method based on time-domain phase shift technology.The measured light is modulated by a spatial light modulator,and the time-domain phase shift technology is further employed to realize the detection and reconstruction of three-dimensional micro-nano devices.Compared with the traditional structured light detection method,this technology uses the spatial light modulator to measure the phase shift while the sample is scanned axially,so as to ensure the measurement accuracy and improve the measurement efficiency.By analyzing the measurement data,this method can quickly realize three-dimensional shape detection and reconstruction,and the measurement accuracy can be better than 10 nm.
出处 《光电工程》 CAS CSCD 北大核心 2021年第4期85-90,共6页 Opto-Electronic Engineering
关键词 形貌检测 微纳检测 相移技术 结构光 profile measurement micro/nano measurement phase-shift structured illumination
